描述

660-063437-010 射頻發(fā)生器

AE APEX 2013 AE 射頻電源 APEX 2013 13.56MHz 2000W射頻發(fā)生器功率密度高，能夠?qū)崿F(xiàn)緊湊型安裝。在空間有限但性能至關(guān)重要的情況下，簡化版APEX Series 射頻發(fā)生器能為客戶提供值得信賴的各種安裝選項(xiàng)和功率。

AE APEX Series 射頻發(fā)生器可以適配腔室、機(jī)架或框架等安裝選項(xiàng)，在提供方便的同時(shí)還可以降低功率損耗。全系列RF Generator 有優(yōu)秀的電弧管理能力，在13.56Mhz頻率下，可選擇1.5KW~10KW不同輸出功率的設(shè)備。

技術(shù)參數(shù)：

Power Level : 1.5, 3, and 5.5 kW

Frequencies : 13 MHz

Available Interfaces : RS-232, 25-pin analog, Ethernet, DeviceNet

AC Input : 208 VAC

Line Frequency : 50/60 Hz

Cooling : Water

Ambient Air Temperature Range : +5 to +40°C

Cooling Water Temperature Range : +5 to +35°C

Advanced Features : Pulsing, CEX

優(yōu)點(diǎn)：

1.靈活性提高，可直接集成工藝機(jī)臺(tái)

2.等離子操作穩(wěn)定化

3.提高快速電弧管理的良品率

4.AE 射頻電源 APEX 2013 13.56MHz 2000W易于根據(jù)客戶的工藝要求進(jìn)行定制和配置

特點(diǎn)：

1.流線型設(shè)計(jì)，實(shí)現(xiàn)大功率密度

2.可選腔室安裝、工具框架安裝、機(jī)架安裝和鞋盒式安裝

3.寬帶控制回路

4.可選脈沖控制

5.高速電弧管理

660-063437-010 射頻發(fā)生器

AE APEX 2013 AE RF Power Supply APEX 2013 13.56MHz 2000W RF generator has high power density and enables compact installation. In situations where space is limited but performance is critical, the simplified APEX Series RF generator offers customers a variety of installation options and power they can trust.

The AE APEX Series RF generator can be adapted to mounting options such as chambers, racks or frames, providing convenience while reducing power loss. The full range of RF generators has excellent arc management capabilities, and can choose 1.5KW~10KW different output power equipment at 13.56Mhz frequency.

Technical parameters:

Power Level: 1.5, 3, and 5.5 kW

Frequencies : 13 MHz

Available Interfaces : RS-232, 25-pin analog, Ethernet, DeviceNet

AC Input : 208 VAC

Line Frequency : 50/60 Hz

Cooling : Water

Ambient Air Temperature Range : +5 to +40°C

Cooling Water Temperature Range : +5 to +35°C

Advanced Features : Pulsing, CEX

Advantages:

1. Improved flexibility, can directly integrate the process machine

2. Plasma operation stabilization

3. Improve the yield of rapid arc management

4.AE RF Power APEX 2013 13.56MHz 2000W is easy to customize and configure according to customer’s process requirements

Features:

1. Streamline design to achieve high power density

2. Optional chamber installation, tool frame installation, rack installation and shoebox installation

3. Broadband control loop

4. Optional pulse control

5. High-speed arc management

 

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公司介紹：
成都陽光不斷創(chuàng)新致力于提升停產(chǎn)的自動(dòng)化零件供應(yīng)水平，無論客戶身處何地，無論所需配件多么稀有，我們總能將客戶與所需產(chǎn)品緊密連接 ，成都陽光零部件覆蓋廣泛。
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Company Introduction:
Chengdu Sunshine Xihe Co., Ltd. specializes in one-stop procurement consulting for imported industrial spare parts, offering original equipment and professional discontinued parts services. We are committed to providing efficient and reliable automation solutions for our customers. Customer support fast responseThe network of partners spans all continentsGlobal partner networkAlways achieve more delivery, be it parts, service or speed



始終實(shí)現(xiàn)更多的交付，無論是零件、服務(wù)還是速度