描述

AX-7670-0190-47768-AMAT-HDP-CVD 反應(yīng)氣體發(fā)生器

ASTRON⑧i反應(yīng)氣體發(fā)生器專為提高流動能力和工藝靈活性而設(shè)計。ASTRONi反 應(yīng)氣體發(fā)生器消除了加工過程中對氬氣的需求，允許選擇與現(xiàn)有工藝氣體兼容的點火氣體，并增加了總體流量,減少了加工時間，提高了吞吐量。

ASTRONi反應(yīng)氣體發(fā)生器基于專利的低場環(huán)形等離子體技術(shù)，可提供更大范圍的工作壓力，同時保持較高的輸入氣體解離率。可靠性、經(jīng)過現(xiàn)場的設(shè)計架構(gòu)結(jié)合了電源、控制模塊和等離子體室。其結(jié)果是一個緊湊的， 蓋子安裝的單位, 這是很容易集成。

ASTRONi反應(yīng)氣體發(fā)生器的主要應(yīng)用是作為反應(yīng)氣體的遠程源，用于清除CVD或FPD工藝室內(nèi)壁上不需要的沉積物，這些工藝室需要更大的工藝靈活性。通過產(chǎn)生氟原子，與室內(nèi)的廢物沉積發(fā)生反應(yīng),形成新的氣體，這些氣體很容易被洗滌，以盡量減少對環(huán)境的影響。此外，與原位射頻方法相比，遠程源減少了對工藝室的磨損。
●操作過程中不需要氬氣
●增加流量減少腔室清潔時間
●連續(xù)運行(CW),不受占空比限制，支持大型腔室和/或長時間清潔
兼容200mm和300mm腔室
選擇點火氣體的靈活性和較低的CoO
●緊湊，蓋子安裝設(shè)計，便于集成
●在寬壓力范圍內(nèi)的高解離率，更強大的操作與室清潔硬件配置

AX-7670-0190-47768-AMAT-HDP-CVD 反應(yīng)氣體發(fā)生器

The ASTRON⑧i reaction gas generator is designed for increased flow capacity and process flexibility. The ASTRONi reaction gas generator eliminates the need for argon during processing, allows the selection of ignition gases compatible with existing process gases, and increases overall flow, reduces processing time, and improves throughput.

The ASTRONi reaction gas generator is based on patented low-field torus plasma technology that provides a wider range of operating pressures while maintaining a high input gas dissociation rate. The reliable, field-tested design architecture combines power, control modules and plasma chambers. The result is a compact, lid-mounted unit, which is easy to integrate.

The main application of the ASTRONi reaction gas generator is as a remote source of reaction gases for removing unwanted deposits from the walls of CVD or FPD process chambers that require greater process flexibility. By producing fluorine atoms, they react with waste deposits in the room to form new gases that can be easily washed to minimize environmental impact. In addition, the remote source reduces wear on the process chamber compared to the in-situ RF method.
● Argon is not required during operation
● Increased flow reduces chamber cleaning time
Continuous operation (CW), free of duty cycle restrictions, supports large chambers and/or long cleaning periods
Compatible with 200mm and 300mm chambers
Flexibility in selecting ignition gas and lower CoO
● Compact, lid mounting design, easy to integrate
High dissociation rate over a wide pressure range, more powerful operation with room cleaning hardware configuration

 

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公司介紹：
成都陽光不斷創(chuàng)新致力于提升停產(chǎn)的自動化零件供應(yīng)水平，無論客戶身處何地，無論所需配件多么稀有，我們總能將客戶與所需產(chǎn)品緊密連接 ，成都陽光零部件覆蓋廣泛。
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Company Introduction:
Chengdu Sunshine Xihe Co., Ltd. specializes in one-stop procurement consulting for imported industrial spare parts, offering original equipment and professional discontinued parts services. We are committed to providing efficient and reliable automation solutions for our customers. Customer support fast responseThe network of partners spans all continentsGlobal partner networkAlways achieve more delivery, be it parts, service or speed



始終實現(xiàn)更多的交付，無論是零件、服務(wù)還是速度